JPH01180064U - - Google Patents
Info
- Publication number
- JPH01180064U JPH01180064U JP7638688U JP7638688U JPH01180064U JP H01180064 U JPH01180064 U JP H01180064U JP 7638688 U JP7638688 U JP 7638688U JP 7638688 U JP7638688 U JP 7638688U JP H01180064 U JPH01180064 U JP H01180064U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- chamber
- outside
- rotating shaft
- sealing device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011553 magnetic fluid Substances 0.000 claims description 4
- 238000007789 sealing Methods 0.000 claims 3
Landscapes
- Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
- Sealing Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7638688U JPH01180064U (en]) | 1988-06-10 | 1988-06-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7638688U JPH01180064U (en]) | 1988-06-10 | 1988-06-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01180064U true JPH01180064U (en]) | 1989-12-25 |
Family
ID=31301411
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7638688U Pending JPH01180064U (en]) | 1988-06-10 | 1988-06-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01180064U (en]) |
-
1988
- 1988-06-10 JP JP7638688U patent/JPH01180064U/ja active Pending